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R&D Lab Equipment (Planned)
- Lithography
- Mask Aligner
- Resist and Polymer Spinners
- Dip Pen Nanolithography
- Nanoimprinting System
- Metrology
- Optical Profilometer
- Surface Profilometer
- Contact Angle Measurement Tool
- SEM, Microscopes, and Spectroscopy
- Environmental SEM
- Focused Ion Beam System
- Light Microscopes w/ DIC
- Fluorescent Microscopes
- Confocal Raman Microscope
- Fluorescence Lifetime Imaging Microscope
- FTIR Spectroscopy
- 3D Stereo Microscope
- Atomic Force Microscope
- Furnaces & Ovens
- Furnace for thermal oxidation
- High temp ovens w vacuum
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- Packaging
- Wafer Dicing Saw
- Wire Bonder
- Thermal Substrate-to-Substrate Bonder
- CNC Mechanical Diamond Drill
- Thin Film Deposition & Etching
- Polymer Deposition/Embossing/Bonding Systems
- Ion Mill with Deposition Gun (Dual Capability)
- Metal Evaporator
- Dielectric Sputter Deposition System
- Laser Etching/Milling System
- RIE (Dielectric) with End Point Detection
- RIE (III-V or Silicon) with End Point Detection
- Biological Experimentation
- Chemical and Biological Hoods
- Incubators
- Syringe Pumps
- Centrifuges
- Specimen Storage Refrigerators
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Teaching Lab Equipment (Planned)
- Lithography
- Mask Aligner
- Resist and Polymer Spinners
- Full Resist and Polymer Processing
- Metrology
- Surface Profilometer
- Contact Angle Measurement Tool
- SEM, Microscopes, and Spectroscopy
- Student SEM
- Light microscopes w DIC
- Furnace / Oven
- Packaging
- Thermal substrate bonder
- CNC mechanical milling and drilling
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- Thin Film Deposition / Etching
- Polymer thin film deposition
- Metal deposition evaporator
- Dielectric sputter deposition system
- RIE (Dielectric) with end point detection
- Biological Experimentation
- Chemical and Biological Hoods
- Incubators
- Syringe Pumps
- Centrifuges
- Specimen Storage Refrigerators
- Design and Modeling Workstations
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Floorplan
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